
要生产晶圆,例如要生产太阳能晶圆产品,晶体需要从所谓的晶体生长炉(单晶炉、多晶炉)内的熔液拉出。
从熔液形成的晶体生长由晶体化的熔液慢慢冷却形成的。因此,测量熔液的温度很重要,同样,测量加热元件的温度以准确控制过程也很重要。这二个温度需要协调好,以确保晶体生长的优化。
Crystals that are produced in crystal growing factories are needed for the production of wafers for the solar industry. To guarantee an optimum crystal growth the temperatures during the process have to be correct. Pyrometers PYROSPOT made by DIAS can realize this measurement task.
DIAS pyrometers of series 10,40 44 are used for the measurement of the melting temperature. The suitable devices of series 40 44 are the types PYROSPOT DS 40N DS 44N that are short-wave spectral pyrometers in the measurement range between 800 °C 2500 °C. Depending on the type of system, ratio pyrometersof type PYROSPOT DSR 10N can be used as well. Besides the devices of the series 44 10 provide the advantage of a bus-compatible interface for the simplified integration in existing control systems.
Different steps of the crystal growing.
For the measurement of the melting temperature during the crystal growth for the measurement of the heating element temperature DIAS has developed special pyrometers PYROSPOT.
Pyrometers with fibre optics small optical head are preferred used for the measurement of the heating temperature because the space available is limited. These pyrometers of type PYROSPOT DSF 40N DSF 44N provide a measurement range between 600 °C 1800 °C for example small optical heads with only 12 mm aperture. Alternatively, optics with 90°-mirror-attachment curved fibre optics are used. The measurement spot size is only of some millimeters aperture in all variants.
The growth process is observed controlled by the optimal interaction of the pyrometer variants for both measurement tasks.
0931-2662464
Lanzhou Feitian Xingye Electronic Technology Co., Ltd.
甘肃省兰州市七里河区兰工坪路287号 兰州理工大学科技园1325室
公司二维码
主要产品:红外测温仪、红外热像仪、红外扫描热成像仪、黑体炉、等通道挤压设备
甘公网安备 62010302001404号